Progressive Surface recently installed three 100HE® plasma spray systems for use in spraying coatings for the semiconductor industry. These systems are designed to spray very thin but dense yttrium oxide (Y2O3) coatings using the suspension plasma spray (SPS) technique. Each system uses our LiquiFeederHE suspension feed unit and the 100HE plasma torch, yielding coatings with microstructures similar to the image below. The as-sprayed Ra surface roughness we achieve for these coatings is typically in the 40 µinch (1 µm) range, which is ideal for these types of applications.
For more information, email sales@progressivesurface.com
